发明名称 |
Failure analysis method and device |
摘要 |
A method comprises steps of: forming a FBM (step S1); generating a second failure map by compressing data of the FBM (step S2); recognizing a failure mode from the second failure map (step S3); selecting a specific failure mode (step S4); and analyzing the specific failure mode by using a part of the corresponding FBM (step S5). This makes a detail analysis possible while suppressing the number of processing data, and thereby achieves a failure analysis method and device improving accuracy and reliability in comparison result.
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申请公布号 |
US6016278(A) |
申请公布日期 |
2000.01.18 |
申请号 |
US19980055905 |
申请日期 |
1998.04.07 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION |
发明人 |
TSUTSUI, TOSHIKAZU;FURUTA, MASAAKI |
分类号 |
G01B11/30;G01N21/88;G01R31/28;G11C29/44;H01L21/66;(IPC1-7):G11C7/00 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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