| 发明名称 |
Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature |
| 摘要 |
A rapid thermal heating apparatus including an infrared camera located outside an evacuable chamber to sense infrared radiation emitted from different regions of a substrate.
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| 申请公布号 |
US6016383(A) |
申请公布日期 |
2000.01.18 |
| 申请号 |
US19980032251 |
申请日期 |
1998.02.27 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GRONET, CHRISTIAN M.;GIBBONS, JAMES F. |
| 分类号 |
C23C16/48;C30B25/10;C30B31/12;C30B31/18;F27B17/00;F27D99/00;G01J5/00;G01J5/06;H01L21/00;H02G3/04;(IPC1-7):A21B2/00 |
主分类号 |
C23C16/48 |
| 代理机构 |
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代理人 |
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| 地址 |
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