| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve maintainability and assembling operability of a fluid control device by enabling only a mass flow controller or a valve to be removed as a single unit, and by enabling the mass flow controller to be removed while switching of the mass flow controller's doorway is controlled by the valve. SOLUTION: A mass flow controller 3 is fixed over adjacent block joints 42 and 43 with screws A3 and A4 and block valves 2 and 4 are fixed over two of adjacent block joints 41, 42, and 43 with screws A1 and A2, A5 and A6, respectively, so the mass flow controller and block valves 2 and 4 can be removed upward by loosening the respective associated screws. Block joints 41, 42 and 43 are fixed to a substrate 11 with screws B1, B4 and B5, respectively. These screws B1, B4 and B5 are visible from the top because they are not covered with the mass flow controller 3 and block valves 2 and 4.</p> |
