| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the burning of the surface of a worktable between workpieces by laser beams and to reduce a defect generating ratio by preparing the workpiece on the upper surface of a projected placing part provided on the worktable. SOLUTION: A workpiece is placed on the upper surface, the surface of which is flat, of a projected placing part 3 which is provided on a worktable 2, and vacuum absorbing holes 3a which are communicated to an absorbing chamber 2a within the worktable 2 are provided. a suction effect is improved and a flaw to the workpiece 5 is prevented by preparing sheets 6 on the flat surface. A protective plate 7 is prepared on the surface of the worktable 2 between the placing parts 3. The workpiece 5 is placed on the upper surface of the placing part 3 by vacuum suction, and the worktable 2 is moved by an X-Y table 1 to work the workpiece while irradiating laser beams from a beam head. The laser beams are focused on the surface of the workpiece 5 and the workpiece is irradiated by the laser beams. Therefore, although the surface of the worktable 2 between the workpieces is irradiated with the laser beams, since the laser beams are not focused on the surface of the worktable 2, burning is prevented.</p> |
