| 摘要 |
PROBLEM TO BE SOLVED: To prevent chipping of a piezoelectric monocrystal in array working so as to prevent deterioration of characteristic and lowering of reliability by providing a piezoelectric vibrator of a piezoelectric monocrystal, a rubber packing on the lower surface, an upper surface acoustic matching layer, and a pitching preventing material between the piezoelectric vibrator and the rubber packing material. SOLUTION: A piezoelectric vibrator 1 is formed of PbO3 monocrystal and slit in a designated direction to be worked into a designated form. An electrode is formed on both upper and lower surfaces of the piezoelectric vibrator 1, and a conductive layer of a flexible printed wiring board is connected to the electrodes. A chipping preventing layer 2 is made adhere to the lower surface of the piezoelectric vibrator 1, and an acoustic matching layer 4 is formed on the upper surface of the piezoelectric vibrator 1. In such a state, the vibrator 1 is set on a dicing saw, and the acoustic matching layer 4, the piezoelectric vibrator 1 and the chipping preventing layer 2 are cut by designated pitch to form a groove extending in parallel to a paper surface. Thus, array working is achieved. After that, a cut groove is filled with silicone resin to make an acoustic lens 5 adhere to the acoustic matching layer 4. |
