发明名称 CURABLE COMPOSITION FOR BACK FIXING MATERIAL USED IN FABRICATION OF SHADOW MASK
摘要 PROBLEM TO BE SOLVED: To provide the curable composition for the back fixing material used in the fabrication of the shadow mask, which gives a cured film excellent in all of etching resistance, alkali-solubility-releasability and pattern formability when a second etching is carried out at high temp. SOLUTION: The curable composition for back fixing material, which is used in a second etching process for the fabrication of the shadow mask, comprises (a) a compound having one carboxyl group and one (meth)acryloyl group, (b) a tri(meth)acrylate of an alkylene oxide addition product of isocyanuric acid and (c) two or more (meth)acryloyl groups. The cured material of the curable composition has alkali-solubility or alkali-releasability.
申请公布号 JP2000017460(A) 申请公布日期 2000.01.18
申请号 JP19980201215 申请日期 1998.07.01
申请人 TOAGOSEI CO LTD 发明人 IGARASHI ICHIRO;JITSUMATSU TETSUJI
分类号 G03F7/004;C09D4/02;C23F1/00;G03F7/027;H01J9/14 主分类号 G03F7/004
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