| 摘要 |
PROBLEM TO BE SOLVED: To condense xenon gases only in the second cryopanel. SOLUTION: A controller 41 controls a second heater 31, a first heater 32, a nitrogen purge valve 34, an exhaust gas valve 35, a roughing valve 36, a roughing pump, a pressure sensor 37, a second temperature sensor 39, a first temperature sensor 40 and a compressor 42 to maintain a temperature T1 of a first cryopanel 27 at T1>=73.5K, while maintaining the temperature T2 of a second cryopanel 28 at T2<=20K. Accordingly, all the xenon gases are condensed only in the second cryopanel 28. Therefore, fluctuation of degree of vacuum in a vacuum chamber caused by separation of xenon gases is eliminated.
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