发明名称 LAMINATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a laminating apparatus reduced in size without generating a surface waviness or a bubble or the like by preventing heating before laminating. SOLUTION: In the laminating apparatus comprising an upper vacuum container 2 having a hot plate 5 of a lower surface in a flat state therein, and an upper vacuum container 1 having a stretchable sheet 7 elastically installed in an opening and a lower vacuum chamber formed therein; two vacuum chambers of an upper vacuum chamber and the lower vacuum chamber are constituted at the sheet 7 as a boundary when both the containers 1, 2 are closed via a sheet 24 to be laminated, the sheet 7 is expanded only at the time of setting a pressure difference at the chambers by pressure reducing the upper chamber, the sheet 24 is pressed to a hot plate via the sheet 7 to be pressurized and heated and laminated.
申请公布号 JP2000015697(A) 申请公布日期 2000.01.18
申请号 JP19980191483 申请日期 1998.07.07
申请人 FUJI ELECTRIC CORP RES & DEV LTD 发明人 YOKOYAMA YASUHIRO
分类号 B29C63/02;H01L31/04 主分类号 B29C63/02
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