| 摘要 |
<p>PROBLEM TO BE SOLVED: To form a film to a prescribed thickness by preventing the thickness reduction in a coating application start region and a subsequent stationary coating application region in an external tank system. SOLUTION: The nozzle side discharge port of a fixed quantity discharge and suction unit 18 is communicated with the inside of a liquid reserving part of a nozzle member and an external coating liquid vessel at the time of coating application and, therefore, when the discharge pressure by this fixed quantity discharge and suction unit 18 is large, this discharge pressure is allowed to escape to the external tank side and, when the pressure is small, the pressure may be compensated by the liquid pressure from the external tank side, by which the accuracy of the discharge pressure of the fixed quantity discharge and suction unit 18 may be made rough. In addition, the film thickness reduction occurring in the movement inertia of the coating liquid and the pressure drop of the liquid route in the coating application start region and the subsequent stationary coating application region is prevented and a desired uniform film thickness may be obtd.</p> |
