发明名称 Method and apparatus for pulling a monocrystal
摘要 A method and an apparatus for pulling a silicon monocrystal from a melt includes the pulling of a conical portion in each case at the beginning and at the end of the monocrystal and the pulling of a cylindrical portion between the conical portions. In this method, the surface of the conical portion at the beginning of the monocrystal is shielded by a shielding means spaced apart from the monocrystal.
申请公布号 US6015460(A) 申请公布日期 2000.01.18
申请号 US19980039068 申请日期 1998.03.13
申请人 WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG 发明人 DORNBERGER, ERICH;VON AMMON, WILFRIED
分类号 C30B15/00;C30B15/14;C30B29/06;(IPC1-7):C30B35/00 主分类号 C30B15/00
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