发明名称 |
Method and apparatus for pulling a monocrystal |
摘要 |
A method and an apparatus for pulling a silicon monocrystal from a melt includes the pulling of a conical portion in each case at the beginning and at the end of the monocrystal and the pulling of a cylindrical portion between the conical portions. In this method, the surface of the conical portion at the beginning of the monocrystal is shielded by a shielding means spaced apart from the monocrystal.
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申请公布号 |
US6015460(A) |
申请公布日期 |
2000.01.18 |
申请号 |
US19980039068 |
申请日期 |
1998.03.13 |
申请人 |
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG |
发明人 |
DORNBERGER, ERICH;VON AMMON, WILFRIED |
分类号 |
C30B15/00;C30B15/14;C30B29/06;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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