| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of heat and deterioration of members even though a rotary shaft is rotated at a high speed, and to prevent the reduction in the seal ability. SOLUTION: A bearing device A is installed in a vacuum chamber 50. The hollow part of an outer tube 10 is communicated with the vacuum chamber 50. Between the inner periphery of the outer tube 10 and the outer periphery of a rotary shaft 20, a bearing to support the radial load of the rotary shaft 20 is formed by circular grooves 21, gas feeding ports 11, and the like. And a forced exhaust means to exhaust forcibly gas at the output end of the rotary shaft 20 from the bearing, in a clearance between the outer periphery of the rotary shaft 20 and the inner periphery of the outer tube 10, is formed by circular grooves 25 and forced exhaust ports 15.
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