| 摘要 |
PROBLEM TO BE SOLVED: To increase the resistance remarkably to a strong acid and also provide a superb mechanical strength and a high chemical resistance and further save on a manufacturing cost by making at least one layer a layer containing a polymer resin with an alicyclic structure, in the multilayer pipe with at least two or more layers. SOLUTION: The multilayer pipe is constructed of two or more layers including a layer containing a polymer resin with an alicyclic structure and another resin. The multilayer pipe 2 is, for example, of such a two-layer structure that a layer 4 containing the polymer resin with the alicyclic structure is formed on the innermost side and a layer 6 containing another resin is formed on the outermost side. The thickness of the layer 4 including the polymer resin with the alicyclic structure on the side which comes into contact with a chemical is made larger than the thickness of the layer 6 containing another resin on the outermost side. Thus it is possible to enhance the chemical resistance and the resistance to elution. Consequently the multilayer pipe is preferably applicable for the transfer of a chemical especially in a semiconductor manufacturing process and the generation of rupture can well be suppressed even when the piping is structured of plural pieces of the multilayer pipe by connecting these pipes.
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