发明名称 |
System for supply of multiple chemicals to a process tool |
摘要 |
This invention concerns a system for delivering multiple different chemicals to a process tool, comprising: a first supply canister connected to a first supply manifold that connects to a process line; a second supply canister connected to a second supply manifold that connects to the process line. |
申请公布号 |
AU4849499(A) |
申请公布日期 |
2000.01.17 |
申请号 |
AU19990048494 |
申请日期 |
1999.06.30 |
申请人 |
ADCS, LTD. |
发明人 |
CRAIG M. NOAH;JOHN N. GREGG |
分类号 |
B01J4/00;B67D7/02;B67D7/84;C23C16/448;F17C7/00;F17C13/04 |
主分类号 |
B01J4/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|