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经营范围
发明名称
WAFER TRANSFER APPARATUS
摘要
申请公布号
KR100240417(B1)
申请公布日期
2000.01.15
申请号
KR19960034267
申请日期
1996.08.19
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
KIM, BYUNG-TAE;LEE, DONG-HYE;PARK, JUN-KEE;JEON, JE-WOO
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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