| 摘要 |
PURPOSE: A control device of a contact force between a semiconductor device and a tester socket is provided to obtain an examined result of the semiconductor device improved with the stability and the reliability. CONSTITUTION: The control device(100) of the contact power between the semiconductor device and the tester socket comprises: an AC submotor assembly(110) to generate a certain pressure for a soft contact between the semiconductor device and the tester socket, and to minutely control the contact; a press unit assembly(200) having a screw assembly(210) and a driving assembly(220).
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