METHOD OF OPERATING A HIGH DENSITY PLASMA CVD REACTOR WITH COMBINED INDUCTIVE AND CAPACITIVE COUPLING,申请号KR19950010291-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	METHOD OF OPERATING A HIGH DENSITY PLASMA CVD REACTOR WITH COMBINED INDUCTIVE AND CAPACITIVE COUPLING
摘要
申请公布号	KR100240534(B1)	申请公布日期	2000.01.15
申请号	KR19950010291	申请日期	1995.04.28
申请人	APPLIED MATERIALS, INCORPORATED	发明人	SAHIN, TURGUT;REDEKER, FRED C.;NOWAK, ROMUALD;LI, SHIJIAN;DYER, TIMOTHY;WITTY, DEREK R.
分类号	H05H1/46;C23C16/44;C23C16/50;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H05H1/46
代理机构		代理人
主权项
地址

您可能感兴趣的专利

IMPROVEMENTS IN OR RELATING TO ELECTRIC MOTORS AND COMPONENTS THEREFOR

Closing device for the rear flap of a motor vehicle

PROCESSO PARA A PREPARACAO DE NOVOS DERIVADOS DE ERITROMICILAMINA

PROCESSO PARA A PREPARACAO DE COMPOSICOES FARMACEUTICAS CONTENDO SAIS MISTOS FORMADOS POR ALFA-CETOACIDOS DE CADEIA RAMIFICADA E L-AMINOACIDOS BASICOS UTILIZAVEIS NO TRATAMENTO DA UREMIA

COMPOSITE MEMBRANE

UNTERDRUCKVERSORGUNGSSYSTEM IN EINEM KRAFTFAHRZEUG

COMPOSITES REINFORCED WITH HIGH STRENGTH ARAMID FIBERS HAVING FIBRILLATED ENDS

Miniature electric motor with worm reduction gearing - has extended end of motor shaft fitted into bore in worm at given spacing from motor bearing

PROCESS FOR PREPARING NON-POROUS MEMBRANE LAYERS

REIFENHERSTELLUNGSMASCHINE

HEAT TREATED CHEMICALLY VAPOR DEPOSITED PRODUCTS AND TREATMENT METHOD

TRICYCLIC AMINE DERIVATIVES

HEAT GENERATING CONTAINER FOR MICROWAVE OVEN

FLOOR POLISHING PAD

TEST CARRIER FOR THE DETERMINATION OF AN ANALYTE FROM WHOLE BLOOD AND A PROCESS FOR THE PRODUCTION THEREOF

ANTIOXIDANT COMPOSITIONS

RADIATION-SENSITIVE POLYMERS WITH DIAZONIUM GROUPS

CURING OF OLEFINS BY METHANETRICARBOXAMIDES