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发明名称
METHOD FOR FORMING A TRENCH ISOLATION
摘要
申请公布号
KR20000000764(A)
申请公布日期
2000.01.15
申请号
KR19980020585
申请日期
1998.06.03
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SIN, KWANG SIK;LEE, WON SEONG
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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