HIGH-FREQUENCY POWER SUPPLYING DEVICE OF SEMICONDUCTOR MANUFACTURING FACILITY

摘要

PURPOSE: A high-frequency power supplying device of a semiconductor manufacturing facility is provided to smoothly contact a coupling to a rotary electrode when supplying the high-frequency power and to supply good high-frequency power. CONSTITUTION: A high-frequency power supplying device comprises: a coupling(18) to receive the high-frequency current and to supply the high-frequency current to a rotary electrode by contacting or without contacting; a supportive piece to reciprocate to be in contact with the coupling or not in contact and to provide a buffer to absorb the shock to the movement of the coupling; and a driving piece to supply the driving power to the supportive piece.