| 摘要 |
PURPOSE: A pitch align device is provided to stably control a pitch of a module device. CONSTITUTION: The pitch align device comprises: a module device(3) fixing unit to fix a module device; and a pitch adjusting unit(4, 6) to adjust a pitch of the module device by moving the module device fixing unit to a first and second positions. The module device fixing unit comprises a foot guide(16) loaded in a sub-base and to make the module device reach safely, a length adjusting guide(14) to form a reference plane of the module device, and an alignment guide to align to fix the module device. The pitch align device further comprises a spring(26) to move forward the alignment guide and an alignment cylinder(20) to move reward the alignment guide.
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