发明名称 |
HANDLER SYSTEM FOR AUTOMATICALLY TESTING A SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: A handler system is provided to prevent a product from being damaged at an input and/or an output of a tray or a user tray. CONSTITUTION: The handler system for automatically testing a semiconductor device comprises: a cabinet(10) disposed so as to be return a test tray; a tray load unit placed at a center of the cabinet, for loading a plurality of trays(11) and user trays(12); a tray transport unit moving in vertical and horizontal directions and transferring the trays and/or the user trays loaded on the tray load unit toward a gripper(30); a pair of loader pick and places(60) for picking up a device loaded on the tray transferred by the tray transport unit to transfer the device thus picked up to the test tray; a pair of unloader pick and places(60) for picking up the device loaded the test tray to again transfer the device depending on a category of the user tray; chambers(81, 82) disposed between the pick and places of the pair, for previous-heating the device and for returning the previously heated device; a tester(80) placed below the cabinet, for testing the device transferred from the loader pick and place; and a control unit(83) for automatically controlling a temperature of the chambers depending on a result of the tester.
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申请公布号 |
KR20000001402(A) |
申请公布日期 |
2000.01.15 |
申请号 |
KR19980021662 |
申请日期 |
1998.06.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SIM, JAE GYUN;JEONG, GI HYEON |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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