发明名称 HANDLER SYSTEM FOR AUTOMATICALLY TESTING A SEMICONDUCTOR DEVICE
摘要 PURPOSE: A handler system is provided to prevent a product from being damaged at an input and/or an output of a tray or a user tray. CONSTITUTION: The handler system for automatically testing a semiconductor device comprises: a cabinet(10) disposed so as to be return a test tray; a tray load unit placed at a center of the cabinet, for loading a plurality of trays(11) and user trays(12); a tray transport unit moving in vertical and horizontal directions and transferring the trays and/or the user trays loaded on the tray load unit toward a gripper(30); a pair of loader pick and places(60) for picking up a device loaded on the tray transferred by the tray transport unit to transfer the device thus picked up to the test tray; a pair of unloader pick and places(60) for picking up the device loaded the test tray to again transfer the device depending on a category of the user tray; chambers(81, 82) disposed between the pick and places of the pair, for previous-heating the device and for returning the previously heated device; a tester(80) placed below the cabinet, for testing the device transferred from the loader pick and place; and a control unit(83) for automatically controlling a temperature of the chambers depending on a result of the tester.
申请公布号 KR20000001402(A) 申请公布日期 2000.01.15
申请号 KR19980021662 申请日期 1998.06.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SIM, JAE GYUN;JEONG, GI HYEON
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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