| 摘要 |
PURPOSE: An automatic cleaning method is provided to minimize a deposition of exhaust gases inner an exhaust line by periodically supplying nitrogen gas having a desired temperature. CONSTITUTION: The cleaning method comprises the steps of opening a solenoid valve(24) due to control of a controller(22) when a cleaning valve(18) is opened and a process valve(20) is closed, thereby exhausting nitrogen gas holding constant pressure and temperature into a purge line(26); and periodic supplying the nitrogen gas to an exhaust line(10) through a checking valve(30) located in the exhaust line(10).
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