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发明名称
SINGLE WAFER EPITAXIAL GROWTH SYSTEM
摘要
申请公布号
KR100239693(B1)
申请公布日期
2000.01.15
申请号
KR19960035283
申请日期
1996.08.24
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
JUN, PYO-MAN
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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