SOLUTION SUPPLYING STRUCTURE OF EVAPORATOR FOR SEMICONDUCTOR CHEMICAL VAPOR DEPOSITION APPARATUS

摘要

PURPOSE: The structure can perform the process repeatedly by blocking the extraction and the density increase of a solute by performing the operation of supplying precursor solution for a constant time through four solution injection tubes in turn. CONSTITUTION: The structure comprises: a body case(12) which a space part(11) is formed in; four solution injector tubes(13) inserted on the top of the case body; a flux controller(14) installed on each solution injection tube; a porous heating plate(15) installed inside the space part of the case body; a gas outflow tube(16) installed on bottom of the case body; and a return gas inflow tube(17) connected to the one side of the top of the case body.