| 发明名称 |
SEMICONDUCTOR PLANT MANAGEMENT SYSTEM |
| 摘要 |
PURPOSE: A semiconductor plant management system is provided to increase applying efficiency of the semiconductor plant and produce the semiconductor product without process defects. CONSTITUTION: The semiconductor plant management system comprises: a host(120) having a process data; a plant server more than two online-connected with the host; a semiconductor plant(110) applying the semiconductor process by the control of the plant server; and an online-connected connecting change module(140) that selectively connects the semiconductor plant with the plant server.
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| 申请公布号 |
KR20000002110(A) |
申请公布日期 |
2000.01.15 |
| 申请号 |
KR19980022687 |
申请日期 |
1998.06.17 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD |
发明人 |
YOO, BYUNG CHUL |
| 分类号 |
H01L21/50;(IPC1-7):H01L21/50 |
主分类号 |
H01L21/50 |
| 代理机构 |
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