ARTICLE AUTOMATION SYSTEM IN MANUFACTURING LINE OF SEMICONDUCTOR

摘要

PURPOSE: A system capable of automatically moving articles in a manufacturing line is provided. CONSTITUTION: The article automation system in a manufacturing line of a semiconductor comprising: manufacturing devices(10) integrally arranged to one another; a track(12) for moving a wafer according to soundings of the manufacturing equipment(10) so that the manufacturing devices(10) share adjacent areas; and a bus including a moving arm for moving articles of the manufacturing devices(10).