| 摘要 |
PURPOSE: An exposing system such as a scanner is provided to improve a uniformity of illumination irrelevant to an aperture by using a mechanical slit. CONSTITUTION: An image of a mechanical slit(11) is illuminate on a surface of a reticle site(17) using a condenser lens(13), thereby forming a slit image(15). Then, the exposing process is performed by scanning the slit image(15) to the reticle site(17). The mechanical slit(11) has one surface of locally convex and concave shaped in direction of the scanning. Since the mechanical slit(11) is flexible, it is enable to bending, thereby reducing varying degree of illumination.
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