DATA MANAGING METHOD OF SEMICONDUCTOR INSTALLATION

摘要

PURPOSE: A data managing method is provided to shorten the time spent in referring and analyzing the speck data list by automatically loading the relevant speck data list when the relevant semiconductor facility starts the processing. CONSTITUTION: The data managing method comprises the steps of: preparing the starting of the processing; deciding the semiconductor facility for proceeding the relevant processing; loading the speck data list related to the decided semiconductor facility; and performing the data managing working by the speck data list.