| 发明名称 |
SEMICONDUCTOR WAFER BOAT |
| 摘要 |
PURPOSE: A semiconductor wafer boat is provided to prevent fine scratches and slipping of a wafer, improving production and shrinkage rate of the semiconductor device. CONSTITUTION: The semiconductor wafer boat comprises; upper part members(12) and lower part members(13) stacked with many wafer(1); three holder members(14) connecting the upper part member(12) and the lower part member(13); many slots(15) formed on side of the holder(14); projection touching the surface of the wafer(1).
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| 申请公布号 |
KR20000002833(A) |
申请公布日期 |
2000.01.15 |
| 申请号 |
KR19980023770 |
申请日期 |
1998.06.23 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HONG, JI HOON;NAM, KI HEUM |
| 分类号 |
H01L21/683;C30B25/12;C30B31/14;H01L21/22;H01L21/31;H01L21/324;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/683 |
| 代理机构 |
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