| 摘要 |
PURPOSE: An IPA vapor returning device is provided to return pure water and the replaced and non-reacted IPA vapor. CONSTITUTION: An IPA vapor collecting device comprises: a waterspout(102) to collect the IPA vapor formed by replacing the deionized water layer to the IPA layer by the IPA vapor on a wafer surface; an outlet(103) to discharge the IPA vapor collected by the waterspout and reacted; and an outlet tube(104) to discharge the IPA vapor discharged to the outlet.
|
