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发明名称
ILLUMINATION OF SEMICONDUCTOR STEPPER
摘要
申请公布号
KR100236712(B1)
申请公布日期
2000.01.15
申请号
KR19960044632
申请日期
1996.10.08
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
KIM, CHOUNG HYEP;KIM, DONG HO;PARK, KYOUNG SHIN;SONG, HO JONG
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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