SEMICONDUCTOR DEVICE WITH SUSCEPTOR EQUIPPED

摘要

PURPOSE: A semiconductor device with a susceptor which can maintain a uniform distribution of a temperature on the surface. CONSTITUTION: The susceptor installed in the semiconductor device comprises; a central body, structured thinner than the edge of it; a strut(42) to support the base of the susceptor(40); a side heater(62a) to provided a radiant heat to the side; a lower heater(62b) installed in the base of the susceptor(40) to provide a radiant heat to the base of the susceptor.