THERMO-STAT FOR SEMICONDUCTOR DEVICE PRODUCTION

摘要

PURPOSE: A thermostat is provided to prevent a foreign substance from flowing into the fan and prevent a decline of the operation rate of the semiconductor device production equipment. CONSTITUTION: The thermostat for a semiconductor device production to control the temperature of the device by circulating refrigerant comprises; a mixing motor(6) to mix the refrigerant; a fan installed at the mixing motor to exhaust heat generated from the mixing motor; a cover having a lot of pores to protect the fan.