WAFER CONVEYING APPARATUS

摘要

PURPOSE: A wafer conveying apparatus is provided to prevent a crack of a wafer and a generation of electrostatic by including a locate-block having thin thickness and making ceramics. CONSTITUTION: The wafer carrier(1) comprises a cassette platform(2) located a wafer cassette; a carrier(3) having an arm(4) for conveying the wafer from the wafer cassette to an inspection chamber; and a locate block(5) for guiding the arm(4) formed in the cassette platform(2). The thickness(T) of the locate block(5) is 4-8 mm and the locate block(5) made of ceramics.