| 摘要 |
PROBLEM TO BE SOLVED: To use plural diaphragms without expanding the size of an aligner. SOLUTION: When a prescribed diaphragm 25 is mounted, a control part 60 controls a slide part 52 and a hand 54, and the desired diaphragm 25 is acquired out of plural diaphragms housed in a stocker 40, inserted into a fixing member 26 and fixed. When the selection of the diaphragm 25 is completed, light emitted from a light source 20 is reflected by an elliptical mirror 21 and reflecting mirror 22 and is made incident through a shutter 23 and an input lens 24 to the diaphragm 25. The diaphragm 25 causes the incident light to be transmitted, corresponding to a prescribed pattern and makes it incident to a condenser lends 27. The light converged by the condenser lends 27 is made incident through a reflecting mirror 28 to a reticule 29. The transmitted light corresponding to a prescribed pattern formed on the reticule 29 is converged in the prescribed region of a wafer 31 placed on a stage 32 by a reduction projecting lens 30.
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