| 摘要 |
PROBLEM TO BE SOLVED: To prevent the reduction in sealing performance and change in physical property of a sealing plate for covering an inlet window of microwave by the action of a high temperature generated in a reaction vessel during plasma treatment, and perform a stable plasma treatment over a long period. SOLUTION: In a structure of sealing an inlet window 2 of microwave provided on one side of a reaction vessel 1 by a plurality of sealing plates supported by a support frame 30 erected thereon, a medium passage 7 is provided on the support frame 30, and cooling water is supplied to the medium passage 7 to cool the sealing plates 3... supported in the opening part of the support frame 30 together with airtight sealing O-rings 6... by the heat exchange with the cooling water carried in the medium passage 7. |
