| 摘要 |
PROBLEM TO BE SOLVED: To make any array of a plurality of displacement parts ideal as possible even in an array thereof on a base body by obtaining a large magnitude displacement according to heat. SOLUTION: This thermal displacement element is provided with a substrate 21 and a displacement part 22 which is supported by the substrate 21 to be displaced according to heat. The displacement part 22 has two individual displacement parts 23 and 24 arranged parallel with each other. The left end of the individual displacement part 23 is fixed on the substrate 21 through a leg part 26. The right end of the individual displacement part 23 is connected to the left end of the individual displacement part 24 through a connection part 25. The dimensional relationship of an expansion modulus between an upper film 31 and a lower film 32 composing the individual displacement part 23 is opposite to that between an upper film 33 and a lower film 34 composing the individual displacement part 23.
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