| 摘要 |
PROBLEM TO BE SOLVED: To provide a microactuator capable of simplifying a displacing amount control system more compared with conventional one. SOLUTION: A fixed substrate 2 and a movable substrate 3 are provided oppositely to each other with a gap, and plural actuators 36, 37 and 38 different from one another in relative displacing amounts are provided in parallel between these substrates. The actuators 36, 37 and 38 are composed of comb-tooth movable electrodes 41 to 43 provided on the movable substrate 3, and fixed electrodes 5 to 10 provided on the fixed substrate 2 and having plural teeth extended from the tooth tips of the movable electrodes 41 to 43 to the outside in a non driven state. The movable substrate 3 is moved so as to move the tooth tips of the movable electrodes 41 to 43 to the tooth outer ends of the fixed electrodes 5 to 10, and the portions of the actuators 36, 37 and 38 extended to the outside of the movable electrode tooth parts of the fixed electrode tooth parts are different in length from one another.
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