REPAIR CIRCUIT HAVING ANTI-FUSE AND PROGRAMMING UNIT FOR PROGRAMMING REDUNDANT CELLS AND MANUFACTURING ANTI-FUSE

摘要

PROBLEM TO BE SOLVED: To provide a repair circuit having an anti-fuse and a programming unit for programming redundant cells, without using a high-cost laser apparatus. SOLUTION: The anti-fuse 20 of the repair circuit comprises a lower electrode 23 having a spacer 23 which has a sharp point inclined at one side and is highly formed on an outside part, a dielectric film formed on the lower electrode 23, and an upper electrode 28 formed on the dielectric film. In programming defective memory cells, a part of the dielectric film bonded to the space of the lower electrode 23 is destructed and the lower electrode 23 and upper electrode 28 are connected. If not using a repairing laser apparatus, defective cells can be replaced with redundant cells.