| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase a response speed by improving the sensitivity of a flow rate detection element for an infrared gas analyzer. SOLUTION: A lower electrode 11 is formed on a substrate 12, a ferroelectric body thin film 9 is formed on it, an upper electrode 10 is formed on it, the upper electrode, the ferroelectric body thin film, and the lower electrode are subjected to patterning in this order by the photolithography method, at the same time a gas circulation hole 15 is formed, then an insulator thin film 13 for covering a pyroelectric detection part 8 being composed of the upper electrode, the ferroelectric body thin film, and the lower electrode is formed, at the same time the gas circulation hole and contact holes 17 and 18 are formed in the insulator thin film, an electrode film for heater is formed on the insulator thin film and is subjected to patterning by the photolithography method, at the same time one portion of the electrode film for heater is dropped into the contact holes for forming the leading electrode of the upper and lower electrodes, and a substrate immediately below the pyroelectric detection part is eliminated by etching for forming an opening 12a, thus manufacturing a pyroelectric type flow rate detection element B.</p> |
