| 摘要 |
PROBLEM TO BE SOLVED: To reduce a space occupied by a fluid transporting tube and an electric cable and also reduce work load for tube arrangement and wiring, and connection mistakes by embedding electric cables inside the tube wall of a tube to distribute a fluid. SOLUTION: This tube cable 11 is composed of a tube 12 used as a fluid passage and electric cables 13 for wiring. A fluid transported by using the tube cable 11 is a compressed air, hydraulic pressure oil, coolant for a motor or an optical element, or purging inert gas. The electric cables 13 are used for power feeding wiring to various kinds of devices and electrical transmission wiring for a control signal and a detection signal. When the tube cable 11 is used for an exposure device, for instance, the air feeding to a cylinder, and the power feeding and an electric signal transmission to a pressure sensor are performed by the single tube cable 11. Thereby, the work load for tube arrangement and wiring can significantly reduced and the multiple electric cables 13 can prevent wiring mistakes by determining the kind of each of the electric cables 13 depending on its position. |
