| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of preventing charge-up and contamination in the midst of observation without executing special preprocessing and stably obtaining a secondary electron image. SOLUTION: In this scanning electron microscope where an electron beam generated from an electron gun 1 is focused and scans a sample 7 and the detection signal of a secondary electron generated from the surface of the sample is detected and the secondary electron image is displayed on a picture display part 11 based on the detection signal, the microscope is equipped with a conductive contact terminal 8 for controlling a potential on the surface of the sample 7, a terminal moving means for displacing the relative position of the terminal 8 and the sample 7 and a detection means 9 for detecting the contact states of the terminal 8 and the sample 7.
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