| 摘要 |
PROBLEM TO BE SOLVED: To prevent the detection precision from lowering due to an electrical and mechanical disturbance and to improve the angular velocity detection precision. SOLUTION: The angular velocity sensor is provided with connection beams c1 and c2 that are floated and supported for a substrate 100 by spring beams b1-b4 with a high deflection property in x and y directions and are symmetrical in reference to a center O, first and second vibration bodies 7 and 17 that are supported by them via spring beams 31-34/35-38 with a high deflection property in x direction, are symmetrical in reference to an x axis where each passes through the center O, and are symmetrical in reference to y axis where each passes through the center O, drive electrodes 5a, 6a/5b, and 6b for performing the x vibration drive of at lest one of them, first displacement detection electrodes 12 and 13 for detecting the y vibration of the first vibration body 7, and second displacement detection electrodes 22 and 23 for detecting the y vibration of the second vibration body 17. In another form, a loop spring beam being excited at one point is used, and first and second vibration bodies 11 and 21 are floated and supported by the first and second drive frames 7 and 17. |
