| 摘要 |
PROBLEM TO BE SOLVED: To provide a parts testing device capable of effectively preventing the generation of dewing in a chamber at generating a temperature alarm and a continuous operation for a long period. SOLUTION: A parts testing device 2 has a chamber 6 having a test stage for testing an IC chip in the inside thereof, cooling devices 60, 62 capable of cooling the inside of the chamber 6 to a normal temperature or lower, heaters 60, 62 capable of heating so as to return a temperature of the inside of the chamber 6 to a normal temperature, temperature sensors 72, 74 detecting a temperature of the inside of the chamber 6, and a temperature control device 70 for controlling an output of the cooling devices and/or heaters 60, 62 which respond to an output from the temperature sensors 72, 74. When an alarm signal such as a temperature abnormality of the inside of the chamber 6 is detected, not only is temperature control is stopped but also normal temperature returning processing is carried out automatically. Furthermore, in the case where a continuous operation time of the parts testing device is longer than a predetermined time, a normal temperature returning processing is carried out automatically.
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