| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting device for visually observing a surface by maintaining a stage to be small regardless of the size of a substrate. SOLUTION: In an inspection device with an observation optical system for the surface of an object 1 to be inspected, an observation optical system is provided with objective optical systems 2 and 3 for forming the image of the object 1 to be inspected, relay optical systems 5, 6, 9, and 10 for forming the image of the object 1 to be inspected being formed by the objective optical systems 2 and 3 again, and an observation system 13 for observing the image of the object 1 to be inspected being formed by the relay optical systems again, the relay optical system is provided with first relay systems 5 and 6 for condensing light via the objective optical systems 2 and 3, and second relay systems 9 and 10 for condensing light through the first relay system, and a first arm 53 for retaining the first relay systems and a second arm 54 for retaining the second relay systems while being connected to the first arm turnably are arranged.
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