| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to execute defect inspection with all of the patterns of in an effective pixel region by having the effective region consisting of plural patterns and forming patterns for dummies to be contrasted with the patterns in this effective region on the outside of the effective region. SOLUTION: A periodic array pattern body 11 has the effective pixel region 10 consisting of wiring patterns 12 for 1024×768 pixels constituting pixels and is further formed with wiring patterns 13 for dummies for one pixel along the periphery of the effective pixel region 10. In such a manner the wiring patterns 13 for dummies have exactly the same constitution as the constitution of the wiring patterns 12 in the effective pixel region 10. The defect detection by an adjacent pixel comparison method my be executed even with the wiring patterns 12 for one column on the circumference of the effective pixel region 10 by using such wiring patterns 13 for dummies. The execution of the defect inspection of all the wiring patterns 12 within the effective pixel region 10 is made possible.
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