| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a field emission type element having a high degree of freedom for working the tip of an emitter in its height direction. SOLUTION: This manufacturing method comprises: a process to form a surface layer including a gate film 11 made of a conductive material on a substrate, a process to form a hole 13 in the surface layer by removing a part of the surface layer, a process to form a side spacer 14a formed from a material of a first sacrificial film on the side wall of the hole, a process to form a second sacrificial film 15 on the entire surfaces of the surface layer and the hole in a manner that forms a flat surface on the bottom of the hole, a process to form a first emitter film 16 made of a conductive material on the entire surface of the second sacrificial film; a process to form a second emitter film 17 by arranging ultra-fine particles of a conductive material on the first emitter film and baking them, and a process to expose the second emitter film by removing an unnecessary part including the tip part of the first emitter film by means of etching.</p> |
