| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate cassette wherein restriction to the detection of the existence of housed wafers is lessened and space contamination in a chamber of a substrate handling apparatus can be little. SOLUTION: In the substrate cassette 11 comprising racks 15 provided for supporting a plurality of wafers W in an approximately parallelepiped box 12 having an opening for inserting and taking out the wafers W, and a cover 13 removably mounted on the opening to seal the interior of the box 12, a plurality of through-holes 16 corresponding to the racks 15 are formed through the back wall 14 opposite to the opening of the box 12, and a door 17 for opening/closing the through-holes 16 is slidably mounted thereon.</p> |
