| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermocompression bonding device for work which is excellent in responsivity at heating/cooling, with shorter cycle time while cooling is allowed even at vacuum-sucking for excellent heat-insulation effect. SOLUTION: A ceramics heater 13 is attached to a rising/falling block 7 through a porous member 12 with gas permeability, and a thermocompression bonding tool 14 is attached to the ceramics heater 13. A sucking hole 18 of the thermocompression bonding tool 14 communicates with a vacuum-sucking part 22 through a pipe member 16 in a hole part 12a formed by penetrating the porous member 12. The porous member 12 is connected to an air supply source 23 and a nitrogen gas supply source 24 thus, a heat-insulating material which is needed so far is eliminated to improve the responsivity at heating/ cooling for shorter cycle time while the vacuum-sucking of a work and adiabatic cooling of a holding member are performed at the same time. |
