| 摘要 |
PROBLEM TO BE SOLVED: To improve a release property by subjecting a metal master disk manufactured by plating a metal into the fine ruggedness of a photoresist manufactured by photolithography and peeling the fine ruggedness after the transfer thereof to treatment in order of heating, irradiation with far IR rays and irradiation with plasma then peeling the plated metal plating. SOLUTION: The metal is plated on the fine ruggedness of the photoresist formed by irradiation with a laser beam for recording of prescribed patterns and development and the metal transferred with the fine ruggeness is peeled. The thus manufactured metal master disk 14 is subjected to the heat treatment, by which org. matter, such as photoresist, is carbonized. Next, the carbide sticking to the surface is decomposed away by irradiation with the far UV rays and the plasma, by which an oxidized film is uniformly formed. Further, a metallic plating layer is formed on the disk 16 for duplication of the stamper obtd. by peeling the formed metallic plating layer thereon and is peeled, by which the stamper is obtd. As a result, the stable release property is imparted to the stamper and the stamper for transfer may be manufactured at a low cost without using chemicals.
|
