| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for heat treating a substrate under reduced pressure while enhancing uniform heating properties. SOLUTION: The heat treatment system comprises rod-like heating lamps 14, 15 arranged in parallel above and below a heat treatment container for containing a substrate to be treated in parallel. The upper and lower infrared heating lamps are arranged in the intersecting directions and the substrate is irradiated with light from the upper and lower infrared heating lamps and heated.
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